A series of experimental measurements of the yield of O3in nuclear‐induced O2and O2‐SF6discharges are reported. The discharges were created by bombardment with energetic particles from the10B(n,&agr;)7Li reaction. Continuous irradiation at dose rates of 1015–1017eV cm−3 s−1and pulsed irradiation (∼10 ms FWHM) at a peak dose rate of ∼1020eV cm−3 s−1were conducted. At the lower dose rates, the addition of SF6generally increased the ozone yield due to the slowing of ozone destruction by negative oxygen and ozone ions. In contrast, at the high dose rates, the ozone concentration decreased due to SF6suppression of atomic oxygen formation by ion–ion recombination. A numerical model was developed and tested against experimental conditions. This model indicates that the steady‐state ozone concentration was limited by the reaction O−3+O3→2O2+O−2with a rate coefficient of ∼1×10−12cm3 s−1. In addition to dose rate effects, pressure and temperature effects on ozone production are discussed and methods for increasing the ozone yield are suggested.