The Structure of Sputtered Silver Films
作者:
C. E. Ells,
G. D. Scott,
期刊:
Journal of Applied Physics
(AIP Available online 1952)
卷期:
Volume 23,
issue 1
页码: 31-34
ISSN:0021-8979
年代: 1952
DOI:10.1063/1.1701973
出版商: AIP
数据来源: AIP
摘要:
The electron microscope has been used to study the structure of sputtered silver films. When compared with evaporated silver films which are prepared at the same rate, the sputtered films are observed to have a more continuous structure. When compared with evaporated silver films which are produced at much faster rates, the sputtered films exhibit a crossover phenomenon in which the thinner films are the more continuous and the thicker films less continuous than evaporated films of the same thickness. These properties are in agreement with resistivity measurements. A possible explanation for the results is proposed.
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