Recombination properties of oxygen‐precipitated silicon
作者:
J. M. Hwang,
D. K. Schroder,
期刊:
Journal of Applied Physics
(AIP Available online 1986)
卷期:
Volume 59,
issue 7
页码: 2476-2487
ISSN:0021-8979
年代: 1986
DOI:10.1063/1.336993
出版商: AIP
数据来源: AIP
摘要:
It is well known that recombination lifetimes are significantly degraded in oxygen‐precipitated silicon. The possible sources for lifetime degradation are expected to be oxygen precipitates (OP’s), dislocation loops, stacking faults, and point defects associated with self‐interstitials generated during the oxygen precipitation process. From the results of an extensive experimental study using IR absorption, TEM, DLTS, and SPV (surface photovoltage), we have found that OP’s are mainly responsible for the observed lifetime degradation and that recombination at OP’s takes place through Si/OP interface states. In addition we have observed that the lifetime degradation is more severe inp‐Si than inn‐Si even for identical densities and sizes of OP’s. A model for recombination at OP’s is presented in terms of the surface recombination velocity at the Si/OP interface and their average density and size. To explain the lifetime difference betweenn‐Si andp‐Si we propose a band bending around OP’s caused by positive fixed charges in the OP’s.
点击下载:
PDF
(1035KB)
返 回