Sampled waveform measurement in integrated circuits using heterodyne electrostatic force microscopy
作者:
G. E. Bridges,
R. A. Said,
M. Mittal,
D. J. Thomson,
期刊:
Review of Scientific Instruments
(AIP Available online 1994)
卷期:
Volume 65,
issue 11
页码: 3378-3381
ISSN:0034-6748
年代: 1994
DOI:10.1063/1.1144576
出版商: AIP
数据来源: AIP
摘要:
A high‐resolution noncontact scanned probe technique has been developed for sampling the internal signals of an operating integrated circuit. The signal waveform is extracted by sensing the localized electrostatic force between a small probe and point on the circuit being measured. A heterodyne approach is used to enable the sampled measurement of high‐frequency digital or analog waveforms. In conjunction with a nulling method, the technique is capable of accurate signal measurement without complex calibration or probe positioning, and can be performed over passivated structures. Measurement of digital and analog signals is demonstrated with a voltage accuracy of less than 100 mV.
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