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GaAs/AlGaAs single‐mode optical waveguides with low propagation loss and strong optical confinement

 

作者: M. Seto,   A. Shahar,   R. J. Deri,   W. J. Tomlinson,   A. Yi‐Yan,  

 

期刊: Applied Physics Letters  （AIP Available online 1990）
卷期: Volume 56, issue 11  

页码: 990-992

 

ISSN:0003-6951

 

年代: 1990

 

DOI:10.1063/1.102572

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Singe‐mode optical waveguides have been fabricated with a saturated bromine water etchant using single‐heterostructure GaAs/AlGaAs epitaxial material, with propagation losses as low as 0.6 dB/cm for 1.66 &mgr;m deeply etched ribs (&Dgr;neff&bartil;2.4) and losses below 0.2 dB/cm for 0.23 &mgr;m shallowly etched ribs (&Dgr;neff=0.0067), measured at &lgr;=1.5 &mgr;m.

 

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