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Plastic relaxation of InGaAs grown on GaAs

 

作者: D. J. Dunstan,   P. Kidd,   L. K. Howard,   R. H. Dixon,  

 

期刊: Applied Physics Letters  (AIP Available online 1991)
卷期: Volume 59, issue 26  

页码: 3390-3392

 

ISSN:0003-6951

 

年代: 1991

 

DOI:10.1063/1.105684

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We report measurements of the plastic relaxation of InGaAs layers grown above critical thickness on GaAs substrates. The relaxation is accurately hyperbolic, proportional to the reciprocal of the layer thickness, in agreement with a recent geometrical theory of critical thickness [D. J. Dunstan, S. Young, and R. H. Dixon, J. Appl. Phys.70, 3038 (1991)]. At large thicknesses, work hardening is observed which leads to a residual strain dependent on the original misfit.

 

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