Pb(Ti0.48Zr0.52)O3films produced by pulsed laser ablation deposition have been locally examined for their homogeneity and thickness through a comparative use of Raman and infrared spectroscopy. Raman scattering intensity appears to be an oscillating function of the position of the point under measurements. The observed oscillations were explained by light interference effects in the film and used to obtain the thickness profile and the refractive index dispersion of the film. The intensity distribution in Raman spectra across the film differs from that of the target. This difference is larger at the center than near the edge of the film. ©1995 American Institute of Physics.