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Gas Incorporation into Sputtered Films

 

作者: Harold F. Winters,   Eric Kay,  

 

期刊: Journal of Applied Physics  (AIP Available online 1967)
卷期: Volume 38, issue 10  

页码: 3928-3934

 

ISSN:0021-8979

 

年代: 1967

 

DOI:10.1063/1.1709043

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The concentration of argon in sputtered nickel films has been obtained as a function of the film‐growth temperature, the discharge pressure, and of the energy (bias voltage) with which the argon ions bombard the growing film. The concentrations vary from about 10−1argon atoms/Ni atom to 10−4argon atoms/Ni atom, depending upon the conditions during film growth. The incorporation of both argon and nitrogen into nickel films is interpreted on the basis of results previously obtained from sorption studies in a more‐idealized system on a pre‐existing nickel surface.

 

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