首页   按字顺浏览 期刊浏览 卷期浏览 Polymerization of Organosilicones in Microwave Discharges. II. Heated Substrates
Polymerization of Organosilicones in Microwave Discharges. II. Heated Substrates

 

作者: A.M. Wrobel,   J.E. Klemberg,   M.R. Wertheimer,   H.P. Schreiber,  

 

期刊: Journal of Macromolecular Science: Part A - Chemistry  （Taylor Available online 1981）
卷期: Volume 15, issue 2  

页码: 197-213

 

ISSN:0022-233X

 

年代: 1981

 

DOI:10.1080/00222338108066441

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

Organosilicone vapors [hexamethyldisiloxane (HMDSO), hexa-methyldisilazane (HMDSN), and hexamethylcyclotrisilazane (HMCTSN)] have been polymerized in a microwave plasma. The reaction kinetics, structure, and density of the plasma polymer films were studied as a function of substrate temperature (Ts) to 800°C, using metal or glass as the substrate.

 

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