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Elastic properties of GaAs during amorphization by ion implantation

 

作者: P. Mutti,   Z. Sklar,   G. A. D. Briggs,   C. Jeynes,  

 

期刊: Journal of Applied Physics  (AIP Available online 1995)
卷期: Volume 77, issue 6  

页码: 2388-2392

 

ISSN:0021-8979

 

年代: 1995

 

DOI:10.1063/1.358763

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Line‐focus beam acoustic microscopy has been used to study changes in the elastic constants of GaAs during amorphization produced by implantation with Si+ions at liquid‐nitrogen temperature. The distribution of amorphous material was determined by Rutherford backscattering and channeling. Values ofc11andc44were estimated by fitting theoretical curves to the measured angular dispersion of surface acoustic waves in the (001) plane. The implanted material was modeled as a statically stressed anisotropic layer on an unmodified GaAs substrate. The values ofc11andc44were found to decrease with increasing ion fluence. At the highest fluence the implanted region was completely amorphous, and it was observed that the softening ofc44(41%) was significantly greater than that ofc11(17%). ©1995 American Institute of Physics.

 

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