Ultrahigh vacuum surface science chamber with integral scanning tunneling microscope
作者:
Andrew J. Leavitt,
Taejoon Han,
John M. Williams,
Roger S. Bryner,
David L. Patrick,
Carol E. Rabke,
Thomas P. Beebe,
期刊:
Review of Scientific Instruments
(AIP Available online 1994)
卷期:
Volume 65,
issue 1
页码: 75-79
ISSN:0034-6748
年代: 1994
DOI:10.1063/1.1144749
出版商: AIP
数据来源: AIP
摘要:
The construction of an ultrahigh vacuum (UHV) surface science chamber equipped with the standard surface analytical techniques and a connected companion UHV chamber containing a scanning tunneling microscope (STM) has been completed. The novel aspects of this experimental system are: the combination of many spatially averaging techniques with STM; a sample holder which is capable ofinsitutransfer between these various capabilities; variable temperature operation;insitutip‐sample approach without mechanical feedthroughs; and various novel software aspects. The sample transfer mechanism allows the sample to be transferred onto the main manipulator and heated or cooled with thermocouple monitoring while electrical isolation from the chamber ground is maintained. The sample then can be transferredinvacuoto the UHV STM for further study. STM tips can be transferred into and out of vacuum and positioned for sputtering and UHV analysis. The various design details which allow forinvacuotransfers will be discussed.
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