首页   按字顺浏览 期刊浏览 卷期浏览 Monte carlo simulation of mixing of a multilayered target
Monte carlo simulation of mixing of a multilayered target

 

作者: A.M. Mazzone,   M. Finetti,  

 

期刊: Radiation Effects  （Taylor Available online 1985）
卷期: Volume 87, issue 4  

页码: 155-161

 

ISSN:0033-7579

 

年代: 1985

 

DOI:10.1080/01422448608209716

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

This work presents a Monte Carlo simulation of ion mixing of a multilayered target. The simulation deals with collisional effects and accounts for the dynamic alteration of the target under ion bombardment. The results refer to As implants, 190 keV, on a target composed of alternating Ni-Ta layers on a Si substrate.

 

点击下载:  PDF (251KB)



返 回