Trimethylgallium dissociative chemisorption on gallium‐rich GaAs(100) surfaces
作者:
J. Randall Creighton,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1991)
卷期:
Volume 9,
issue 6
页码: 2895-2899
ISSN:0734-2101
年代: 1991
DOI:10.1116/1.577148
出版商: American Vacuum Society
关键词: CHEMISORPTION;SORPTIVE PROPERTIES;GALLIUM ARSENIDES;GALLIUM COMPOUNDS;ORGANOMETALLIC COMPOUNDS;MEDIUM TEMPERATURE;DISSOCIATION;DESORPTION;METHYL RADICALS;GaAs
数据来源: AIP
摘要:
Trimethylgallium (TMGa) chemisorption on the gallium‐rich ‘‘(4×6)’’ and (1×6) GaAs(100) surfaces has been studied with temperature programmed desorption (TPD) and static secondary ion mass spectroscopy (SSIMS). Low coverages of TMGa irreversibly dissociate on GaAs(100) and methyl radicals are the main gas‐phase product observed around 700 K during TPD. At higher TMGa coverages some recombinative desorption of molecular TMGa occurs from 250–650 K. On the Ga‐rich surface reconstructions the desorbing methyl radicals are kinetically indistinguishable, strongly suggesting that they evolve from a single type of binding site. We believe this binding site corresponds to surface MMGa, which is formed by stepwise methyl group transfer from chemisorbed TMGa to neighboring surface gallium atoms. The presence of MMGa is supported by SSIMS results at ∼650 K. Temperature‐programmed SSIMS was used to follow the dissociation of adsorbed TMGa from 120 to 700 K.
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