Self-assembled fullerene-diaminoaodecane multilayer films were prepared on planar silicon wafer and quartz plate and on nonplanar fumed silica surfaces, and the growth of each layer and its uniformity was charackrized by using FTIR, UV, contact angle measurement and ellipsometric measurement. It is suggested that fullerene-diaminododecane layers are not completely packed on oxide surfaces, but the growrh of each layer was confirmed.