High crystalline quality epitaxial metal/insulator superlattices composed of Ti1−xAgx(0.03<x<0.06) and MgO have been grown on MgO(001) substrates at 273 K by electron beam evaporation in ultrahigh vacuum. X‐ray diffraction measurements and cross‐sectional high‐resolution transmission electron microscopy measurements revealed that the crystal structures of the TiAg alloy and MgO in the superlattices were tetragonal and that the superlattices were so‐called strained‐layer superlattices. The x‐ray rocking curve was measured around one of satellite peaks in the middle angle range, and showed the full width at half‐maximum of the curve was 0.04°–0.05°. ©1996 American Institute of Physics.