Electrostatic Probe Determination of Electron Density in Medium Pressure (0.2–28 Torr) Discharge Plasma of Argon
作者:
Sin‐Li Chen,
Jen‐Shih Chang,
S. Matsumura,
期刊:
Journal of Applied Physics
(AIP Available online 1970)
卷期:
Volume 41,
issue 4
页码: 1711-1715
ISSN:0021-8979
年代: 1970
DOI:10.1063/1.1659096
出版商: AIP
数据来源: AIP
摘要:
The validity of electron‐density determinations using spherical probe in medium pressure discharge plasmas (rp/&lgr;e∼0.3 to 40, whererp=probe radius, &lgr;e=electron mean‐free path) are examined for density rangeNe=109−1011cm−3. Various collision‐dominated probe theories are used to obtainNefrom both electron and ion saturation currents (IeandIi).Nedetermined fromIecoincide reasonably with those determined from microwave measurement, whileNefromIiare always greater than those from microwave measurement by a factor of 2 to 100. The discrepancy increases with increasing gas pressure and total discharge current, andIican not be used forNedeterminations. There is ``break'' on the ion current characteristics which is the same as that reported in the measurement of very low‐density flowing afterglow plasmas (Ne<108cm−3). Explanation is offered in connection with the unusual increase of ion current caused by the release of electrons from the probe surface by collisions of metastables and the decrease of regular thermal‐motion current because of the short mean‐free path condition (&lgr;6<rp).
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