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The role of film re‐emission and gas scattering processes on the stoichiometry of laser deposited films

 

作者: J. Gonzalo,   C. N. Afonso,   J. Perrie`re,  

 

期刊: Applied Physics Letters  (AIP Available online 1995)
卷期: Volume 67, issue 9  

页码: 1325-1327

 

ISSN:0003-6951

 

年代: 1995

 

DOI:10.1063/1.114528

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Laser ablation of a BiSrCaCuO target is performed both in vacuum and in an oxygen pressure of 0.1 mbar. Two substrates are located in the chamber in order to study the role of re‐emission processes from the growing film and/or the scattering of the ablated species by an oxygen atmosphere. The results indicate that re‐emission processes from the growing film are very weak (they may affect up to 1% of the deposited material at most) and are not related to the re‐sputtering of the growing film. Films grown in vacuum are found to have the correct cation composition, whereas those grown in an oxygen environment show significant variations which are clearly related to gas scattering processes. ©1995 American Institute of Physics.

 

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