The data gained on discharge pumped XeCl laser systems over the last 15 years were analyzed to identify common inherent regularities. It is obvious that there are three major classes of phenomena involved, namely: the electrical processes in the pumping circuit, the plasma-chemical kinetics, and the discharge contraction. It has been demonstrated that under certain conditions they can be considered separately. Such an approach allows one to estimatea priorithe optimal pumping conditions and the electrical circuit parameters to obtain the required laser energy. The results presented could be used in the engineering calculations of high-performance excimer laser systems to significantly reduce the cost of the design and the optimization stages. ©1997 American Institute of Physics.