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Intensity‐dependent photobleaching in thin polymer films by excimer laser: Lithographic implications

 

作者: James R. Sheats,  

 

期刊: Applied Physics Letters  (AIP Available online 1984)
卷期: Volume 44, issue 10  

页码: 1016-1018

 

ISSN:0003-6951

 

年代: 1984

 

DOI:10.1063/1.94604

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Strongly intensity‐dependent photobleaching was observed in polymethyl methacrylate films doped with acridine and irradiated by a KrF laser. The transmission of low intensity pulses (<2 MW/cm2) increased from <0.01% to 60% as the intensity of a single prior bleaching pulse increased from 3 to 4 MW/cm2. The implications of this result for image enhancement in excimer laser projection photolithography are discussed: features in the region of 0.2–0.3 &mgr;m may be printable by such techniques.

 

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