Electron microscope studies of an alloyed Au/Ni/Au‐Ge ohmic contact to GaAs
作者:
T. S. Kuan,
P. E. Batson,
T. N. Jackson,
H. Rupprecht,
E. L. Wilkie,
期刊:
Journal of Applied Physics
(AIP Available online 1983)
卷期:
Volume 54,
issue 12
页码: 6952-6957
ISSN:0021-8979
年代: 1983
DOI:10.1063/1.332011
出版商: AIP
数据来源: AIP
摘要:
The interface structures resulting from the alloying reactions between a Au/Ni/Au‐Ge composite film and a (100) GaAs substrate were studied by transmission electron microscopy and scanning transmission electron microscopy. Electron microscope examinations of the cross‐sectional samples prepared in this study offered excellent lateral and depth resolution of local structures which are not available by other analytical techniques used previously in similar studies. The distributions and chemical compositions of various phases formed, and the morphologies of the interfaces between these phases were monitored and compared with the measured contact resistances at three different stages of alloying. A correlation between the interface structure and the contact resistance was found.
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