We have investigated the deposition of size-selected metal clusters(Ag400)onto a stepped graphite surface. The clusters were produced with an inert gas condensation cluster source and were imaged on the surface with a high-resolution scanning electron microscope. For modest cluster deposition energies, cluster aggregation is much more limited at the steps than on the flat terrace regions of the surface, suggesting the possibility of the fabrication of structured arrays (e.g., chains) of size-selected particles. A theoretical analysis of the particle-particle gap size distribution along the step probes the 1D mobility of the particles trapped at the step. ©1998 American Institute of Physics.