Measurements of charged particles in the laser ablation plume of polymers
作者:
T. Fujii,
S. Inoue,
F. Kannari,
期刊:
Journal of Applied Physics
(AIP Available online 1995)
卷期:
Volume 78,
issue 5
页码: 3401-3407
ISSN:0021-8979
年代: 1995
DOI:10.1063/1.359968
出版商: AIP
数据来源: AIP
摘要:
Charged particles in organic polymer plumes photoablated by ultraviolet lasers are measured with a Faraday cup assembly. In spite of a relatively low F2laser (157 nm) fluence <1 J/cm2, relative charged fragment concentrations measured for polyimide, polytetrafluoroethylene, and polyethyleneterephthalate targets are ≳10−3. Charged particle concentrations in the ablation plumes generated by an F2laser with polyethyleneterephthalate and polyimide targets are always higher than those in KrF laser (248 nm) ablation plumes at the same specific laser energy deposited on the target. Charged fragments have also higher velocities in the F2laser ablation plumes. An exponential increase in the charged fragment concentration with increasing laser fluence suggests that the ions are mainly produced through electron‐neutral collisions in the hot material core close to the target surface. ©1995 American Institute of Physics.
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