Novel structure TE/TM mode selective optical channel waveguides are proposed and fabricated in GaAs/AlAs superlattices (SLs) using impurity‐free disordering induced by SiO2cap annealing. The disordered SL regions are found to be useful as low‐loss waveguides even at a wavelength close to the absorption edge of the as‐grown SL. By observing the near‐field patterns, it is confirmed that these channel waveguides could selectively confine TE or TM polarized light.