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Rapid response SiC thin‐film thermistor

 

作者: Takeshi Nagai,   Kazushi Yamamoto,   Ikuo Kobayashi,  

 

期刊: Review of Scientific Instruments  （AIP Available online 1984）
卷期: Volume 55, issue 7  

页码: 1163-1165

 

ISSN:0034-6748

 

年代: 1984

 

DOI:10.1063/1.1137875

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The thermistor consisted of a rf‐sputtered SiC film deposited on one surface of an alumina ceramic plate. The thermistor element was brazed to the inner surface of a cylindrical metal housing at the closed end. The thermistor can detect temperatures with a thermal time constant of about 0.6 s.

 

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