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Contribution to the Floating Zone Refining of Silicon

 

作者: E. Buehler,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1957)
卷期: Volume 28, issue 6  

页码: 453-460

 

ISSN:0034-6748

 

年代: 1957

 

DOI:10.1063/1.1715905

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A floating zone refining apparatus for silicon, which can operate unattended, has been assembled to assist in the production of high purity material for research purposes. Features of this equipment are a simple mechanical drive, a switching panel to recycle the apparatus, and a self‐stabilizing rf heating circuit to maintain constant zone length. Silicon containing less than 1 part per billion of electrically active impurities (resistivity of 16 000 ohm cm and lifetime of 1.2 milliseconds) has been prepared. The effect of many‐pass refinings on the diameter of the sample is discussed. Surface tension effects on material transport are significant.

 

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