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Formation of thin TiC-SiC layers on graphite substrate by reactive chemical vapour deposition

 

作者: VincentH.,   ScharffJ.P.,   VincentC.,   BouixJ.,  

 

期刊: Materials at High Temperatures  (Taylor Available online 1992)
卷期: Volume 10, issue 1  

页码: 2-10

 

ISSN:0960-3409

 

年代: 1992

 

DOI:10.1080/09603409.1992.11689391

 

出版商: Taylor&Francis

 

关键词: CVD;coatings;graphite;SiC;TiC

 

数据来源: Taylor

 

摘要:

A succession of two reactive chemical vapour depositions (RCVD) processes have been used to produce a double coating of TiC and SiC on a graphite substrate. In this paper, thermodynamic computations have been used to define the optimal conditions of the partial or the total conversion of a TiC coating into SiC. The experiments have been made on TiC powders and planar graphite substrates. The texture and the microstructure of the layers have been investigated as a function of the initial gas composition for different temperatures. These results will be useful to deposit a protective double layer on every single filament of a carbon fibre.

 

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