Formation of thin TiC-SiC layers on graphite substrate by reactive chemical vapour deposition
作者:
VincentH.,
ScharffJ.P.,
VincentC.,
BouixJ.,
期刊:
Materials at High Temperatures
(Taylor Available online 1992)
卷期:
Volume 10,
issue 1
页码: 2-10
ISSN:0960-3409
年代: 1992
DOI:10.1080/09603409.1992.11689391
出版商: Taylor&Francis
关键词: CVD;coatings;graphite;SiC;TiC
数据来源: Taylor
摘要:
A succession of two reactive chemical vapour depositions (RCVD) processes have been used to produce a double coating of TiC and SiC on a graphite substrate. In this paper, thermodynamic computations have been used to define the optimal conditions of the partial or the total conversion of a TiC coating into SiC. The experiments have been made on TiC powders and planar graphite substrates. The texture and the microstructure of the layers have been investigated as a function of the initial gas composition for different temperatures. These results will be useful to deposit a protective double layer on every single filament of a carbon fibre.
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