Lattice curvature ofInxGa1−xAs/GaAs[001] graded buffer layers
作者:
F. Romanato,
M. Natali,
E. Napolitani,
A. V. Drigo,
A. Bosacchi,
C. Ferrari,
S. Franchi,
G. Salviati,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1998)
卷期:
Volume 16,
issue 6
页码: 3578-3581
ISSN:0734-2101
年代: 1998
DOI:10.1116/1.581001
出版商: American Vacuum Society
关键词: (In,Ga)As;GaAs
数据来源: AIP
摘要:
Ion channeling analysis and x-ray diffraction reciprocal space maps have been performed onInxGa1−xAsbuffer layers grown with different composition profiles on well-cut (001) GaAs substrates. On all of the samples analyzed we detect acurvatureof the layer lattice, i.e., a tilt of the lattice with respect to the substrate which varies coherently along the sample surface. The layer tilt is directed inward defining a curvature that is concave, large (up to2.5° cm−1) and that decreases when approaching the substrate. We describe this new phenomenon in terms of a coherent lateral distribution of the orientations of the misfit dislocation Burgers’ vectors.
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