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Lattice curvature ofInxGa1−xAs/GaAs[001] graded buffer layers

 

作者: F. Romanato,   M. Natali,   E. Napolitani,   A. V. Drigo,   A. Bosacchi,   C. Ferrari,   S. Franchi,   G. Salviati,  

 

期刊: Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films  (AIP Available online 1998)
卷期: Volume 16, issue 6  

页码: 3578-3581

 

ISSN:0734-2101

 

年代: 1998

 

DOI:10.1116/1.581001

 

出版商: American Vacuum Society

 

关键词: (In,Ga)As;GaAs

 

数据来源: AIP

 

摘要:

Ion channeling analysis and x-ray diffraction reciprocal space maps have been performed onInxGa1−xAsbuffer layers grown with different composition profiles on well-cut (001) GaAs substrates. On all of the samples analyzed we detect acurvatureof the layer lattice, i.e., a tilt of the lattice with respect to the substrate which varies coherently along the sample surface. The layer tilt is directed inward defining a curvature that is concave, large (up to2.5° cm−1) and that decreases when approaching the substrate. We describe this new phenomenon in terms of a coherent lateral distribution of the orientations of the misfit dislocation Burgers’ vectors.

 

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