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A method of utilizing lithium‐induced nuclear reactions in the determination of carbon, nitrogen, and oxygen in thin films

 

作者: C. Cardinal,   C. Brassard,   J. Chabbal,   L. Descheˆnes,   J. P. Labrie,   J. L’Ecuyer,   Marc Leroux,  

 

期刊: Applied Physics Letters  （AIP Available online 1975）
卷期: Volume 26, issue 9  

页码: 543-545

 

ISSN:0003-6951

 

年代: 1975

 

DOI:10.1063/1.88249

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A method of analysis of oxygen, nitrogen, and carbon in thin samples involves the detection of charged particles from nuclear reactions induced by a 7‐MeV lithium‐6 beam. The particle detection with a telescope counter near 0° takes full advantage of high exothermic reactions. The sensitivity is of the order of 10−3&mgr;g/cm2. A preliminary study of the contaminants introduced during the sputtering of niobium is presented.

 

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