Compositional distributions of films laser depositedinvacuoat energy densities <1 J/cm2were found to be partly different from previous observations and theories. Analyzing them, we have inferred that evaporation processes at low energy densities contain decomposition of the target materials and evaporation of the decomposed materials. Based on these analyses, we have concluded that pulsed laser codeposition was one of best pulsed laser deposition methods. To realize this using one laser source, a modified version of pulsed‐laser‐deposition rapid‐sequential‐pulsed‐laser deposition, is introduced. The dependence of YBa2Cu3O7films properties on deposition conditions is discussed. Elimination of particulates is demonstrated and good electrical and crystallographic properties as well as suppression of precipitates were achieved in films having the correct stoichiometric composition. ©1995 American Institute of Physics.