Statistical investigation of sol-gel lead titanate (PT) processing
作者:
B. M. Melnick,
R. Gallegos,
C. A. Paz De Araujo,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1992)
卷期:
Volume 2,
issue 1-4
页码: 255-268
ISSN:1058-4587
年代: 1992
DOI:10.1080/10584589208215748
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
There are three stages involved in the successful application of a thin film sol-gel oxide, (1) solution synthesis, (2) application, and (3) post application treatments. Each stage contains many processing steps that can be varied in order to optimize the thin film for various applications. This work entails a statistical investigation of a thin film sol-gel PT process for use in memory applications.Statistical experimental design yields a maximum amount of information for a minimum amount of effort. Candidate controllable variables (factors) and responses are first identified. A screening experiment is then conducted to identify the most important factors based on the identified responses. A full-factorial experiment is then conducted to further evaluate the important factors. Finally, a response surface analysis is performed in order to optimize the important factors. Responses such as switching charge (2Pr), endurance and dielectric measurements are used to analyze the sol-gel lead titanate.
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