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Stress-engineered spatially selective self-assembly of strained InAs quantum dots on nonplanar patterned GaAs(001) substrates

 

作者: A. Konkar,   A. Madhukar,   P. Chen,  

 

期刊: Applied Physics Letters  (AIP Available online 1998)
卷期: Volume 72, issue 2  

页码: 220-222

 

ISSN:0003-6951

 

年代: 1998

 

DOI:10.1063/1.120691

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The lattice-mismatch stress-induced two-dimensional-to-three-dimensional morphology change is combined with interfacet adatom migration to selectively assemble parallel chains of InAs islands on top of [11¯0] oriented stripe mesas of sub-100-nm widths on GaAs(001) substrates. On such mesa stripes, preparedin situvia size-reducing epitaxy, deposition of InAs amounts subcritical for island formation on planar GaAs (001) is shown to allow self-assembly of three, two, and single chains of InAs three-dimensional island quantum dots selectively on the stripe mesa tops for widths decreasing from 100 nm down to 30 nm. ©1998 American Institute of Physics.

 

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