The limitations of traditional probe microscopy and possibilities to overcome them are considered. Using of the resonance‐tunneling effect is proposed and this effect is shown to make it possible to obtain information not only about the first atomic layer of the surface but also about the second, third atomic layer and some subsequent ones. Calculations are made of effectiveness of using the resonance tunneling for studying deep‐laid atomic layers of the surface. The expression of the tunneling current in case of the resonance tunneling has been proposed. © 2003 American Institute of Physics