Resist heating effect in direct electron beam writing
作者:
Takayuki Abe,
Kenji Ohta,
Hirotsugu Wada,
Tadahiro Takigawa,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1988)
卷期:
Volume 6,
issue 3
页码: 853-857
ISSN:0734-211X
年代: 1988
DOI:10.1116/1.584309
出版商: American Vacuum Society
关键词: LITHOGRAPHY;ELECTRON BEAMS;SENSITIVITY;HEATING;MATHEMATICAL MODELS;resist
数据来源: AIP
摘要:
A new model for the analysis of resist heating is proposed and applied to the direct electron beam writing method using a variably‐shaped electron beam system and a single‐layer resist. From calculations based on the present model and experiment, it was found that the resist heating effect leads to resist ablation, difference in resist sensitivity between single exposure and multiple exposures, and depth dependence and beam size dependence of resist sensitivity. It also explains the degradation of shaped beam stitching accuracy as well as pattern size error. The resist heating effect is more serious for direct writing than the estimation obtained from a conventional model. In order to realize submicron patterns below 0.5 μm with considerable high throughput, the use of a highly sensitive resist is essential for overcoming the resist heating effect.
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