KrF laser‐induced ablation and patterning of Y–Ba–Cu–O films
作者:
J. Heitz,
X. Z. Wang,
P. Schwab,
D. Ba¨uerle,
L. Schultz,
期刊:
Journal of Applied Physics
(AIP Available online 1990)
卷期:
Volume 68,
issue 5
页码: 2512-2514
ISSN:0021-8979
年代: 1990
DOI:10.1063/1.346519
出版商: AIP
数据来源: AIP
摘要:
The ablation and patterning of Y–Ba–Cu–O films on (100) SrTiO3and (100) MgO substrates by KrF excimer‐laser light projection was investigated. Three different regimes of laser‐material interactions were observed. Transition temperatures and critical current densities in laser‐fabricated strip lines were investigated.
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