1/fnoise as an early indicator of electromigration damage in thin metal films
作者:
K. Dagge,
W. Frank,
A. Seeger,
H. Stoll,
期刊:
Applied Physics Letters
(AIP Available online 1996)
卷期:
Volume 68,
issue 9
页码: 1198-1200
ISSN:0003-6951
年代: 1996
DOI:10.1063/1.115967
出版商: AIP
数据来源: AIP
摘要:
Electromigration in thin films of aluminium and aluminium alloys is shown to lead to stepwise increases of the electrical 1/fnoise. These are attributed to the generation of highly mobile defect configurations by a nucleation‐and‐growth process. It is conjectured that among them may be the defects that are responsible for the eventual failure of VLSI electronic devices by electromigration damage. 1/fnoise promises to be an early indicator of this damage. ©1996 American Institute of Physics.
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