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1/fnoise as an early indicator of electromigration damage in thin metal films

 

作者: K. Dagge,   W. Frank,   A. Seeger,   H. Stoll,  

 

期刊: Applied Physics Letters  (AIP Available online 1996)
卷期: Volume 68, issue 9  

页码: 1198-1200

 

ISSN:0003-6951

 

年代: 1996

 

DOI:10.1063/1.115967

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Electromigration in thin films of aluminium and aluminium alloys is shown to lead to stepwise increases of the electrical 1/fnoise. These are attributed to the generation of highly mobile defect configurations by a nucleation‐and‐growth process. It is conjectured that among them may be the defects that are responsible for the eventual failure of VLSI electronic devices by electromigration damage. 1/fnoise promises to be an early indicator of this damage. ©1996 American Institute of Physics.

 

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