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A low frequency rf discharge: A possible source of D−?

 

作者: C. A. Anderson,   W. G. Graham,  

 

期刊: AIP Conference Proceedings  (AIP Available online 1990)
卷期: Volume 210, issue 1  

页码: 278-284

 

ISSN:0094-243X

 

年代: 1990

 

DOI:10.1063/1.39597

 

出版商: AIP

 

数据来源: AIP

 

摘要:

By using a time‐resolved Langmuir probe method, the time dependent plasma parameters of a low frequency (<500 kHz) rf driven D2discharge have been measured. It is found that at certain times during the rf cycle, the electron temperatures measured are very low (0.2–0.8 eV). This suggests that rf driven discharges may be suitable as sources of negative ions.

 

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