A low frequency rf discharge: A possible source of D−?
作者:
C. A. Anderson,
W. G. Graham,
期刊:
AIP Conference Proceedings
(AIP Available online 1990)
卷期:
Volume 210,
issue 1
页码: 278-284
ISSN:0094-243X
年代: 1990
DOI:10.1063/1.39597
出版商: AIP
数据来源: AIP
摘要:
By using a time‐resolved Langmuir probe method, the time dependent plasma parameters of a low frequency (<500 kHz) rf driven D2discharge have been measured. It is found that at certain times during the rf cycle, the electron temperatures measured are very low (0.2–0.8 eV). This suggests that rf driven discharges may be suitable as sources of negative ions.
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