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Electron Interactions WithC3F8

 

作者: L. G. Christophorou,   J. K. Olthoff,  

 

期刊: Journal of Physical & Chemical Reference Data  (AIP Available online 1998)
卷期: Volume 27, issue 5  

页码: 889-913

 

ISSN:0047-2689

 

年代: 1998

 

DOI:10.1063/1.556024

 

出版商: AIP

 

数据来源: AIP

 

摘要:

To aid the many and diverse applications for which perfluoropropane(C3F8)is suited, we critically evaluate and synthesize existing knowledge on electron scattering and electron energy-loss processes for theC3F8molecule, and provide recommendations for the most reliable data. We also draw attention to electron-interaction data that are not presently available, but are needed for modeling the behavior ofC3F8in practical uses, especially plasma processing. ©1998 American Institute of Physics and American Chemical Society.

 

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