Electron Interactions WithC3F8
作者:
L. G. Christophorou,
J. K. Olthoff,
期刊:
Journal of Physical & Chemical Reference Data
(AIP Available online 1998)
卷期:
Volume 27,
issue 5
页码: 889-913
ISSN:0047-2689
年代: 1998
DOI:10.1063/1.556024
出版商: AIP
数据来源: AIP
摘要:
To aid the many and diverse applications for which perfluoropropane(C3F8)is suited, we critically evaluate and synthesize existing knowledge on electron scattering and electron energy-loss processes for theC3F8molecule, and provide recommendations for the most reliable data. We also draw attention to electron-interaction data that are not presently available, but are needed for modeling the behavior ofC3F8in practical uses, especially plasma processing. ©1998 American Institute of Physics and American Chemical Society.
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