AlGaAs/GaAs heterojunction bipolar transistor with a planar‐doped two‐dimensional hole gas base grown by molecular‐beam epitaxy
作者:
R. J. Malik,
L. M. Lunardi,
J. F. Walker,
R. W. Ryan,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1988)
卷期:
Volume 6,
issue 2
页码: 682-684
ISSN:0734-211X
年代: 1988
DOI:10.1116/1.584390
出版商: American Vacuum Society
关键词: HETEROJUNCTIONS;BIPOLAR TRANSISTORS;MOLECULAR BEAM EPITAXY;GALLIUM ARSENIDES;ALUMINIUM ARSENIDES;FABRICATION;CRYSTAL DOPING;GAIN;PERFORMANCE;CHARGED−PARTICLE TRANSPORT;(Al,Ga)As;GaAs
数据来源: AIP
摘要:
A new type of AlGaAs/GaAs heterojunction bipolar transistor which employs a two‐dimensional‐hole gas base formed by planar doping using molecular‐beam epitaxy has been demonstrated. The base consists of a submonolayer of Be atoms of sheet concentration 0.5–5×1013cm−2which is deposited during growth interruption by molecular‐beam epitaxy. Transistor structures exhibit dc current gains up to 700. The effective base transit time is negligible in these transistors and it is postulated that very high speed nonequilibrium transport may occur in the collector region.
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