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Realization of limited‐area cathodes and their performance in an electron optical column

 

作者: C. E. Maloney,   H. Nakamura,   A. N. Broers,   S. Xia,   L. Peters,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  （AIP Available online 1994）
卷期: Volume 12, issue 1  

页码: 26-31

 

ISSN:1071-1023

 

年代: 1994

 

DOI:10.1116/1.587153

 

出版商: American Vacuum Society

 

关键词: ELECTRON SOURCES;BEAM OPTICS;STM;BEAM ANALYZERS;CATHODES;PERFORMANCE;CONICAL CONFIGURATION;BRIGHTNESS;SPACE CHARGES;TUNGSTEN;POROUS MATERIALS;W

 

数据来源: AIP

 

摘要:

Limited‐area cathodes based upon impregnated dispenser cathode material have been investigated in an electron optical column at accelerating voltages of up to 30 kV. A peak axial brightness of about 6×105A/cm2 sr was obtained at this voltage using a flat cathode. Brightness values greater by a factor of 10 were measured using a conical limited‐area cathode with a tip radius of curvature of 0.075 mm. The latter measurements were affected by space–charge spreading in the beam.

 

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