Surface oxidation of GaAs and AlGaAs in low‐energy Ar/O2reactive ion beam etching
作者:
Haruhisa Kinoshita,
Toshimasa Ishida,
Katsuzo Kaminishi,
期刊:
Applied Physics Letters
(AIP Available online 1986)
卷期:
Volume 49,
issue 4
页码: 204-206
ISSN:0003-6951
年代: 1986
DOI:10.1063/1.97171
出版商: AIP
数据来源: AIP
摘要:
Ion beam etching (IBE) and reactive IBE (RIBE) of GaAs and AlxGa1−xAs(x=0.3–0.5) were examined using Ar and Ar/O2(O2: 2.0 and 5.3 mol %). In Ar IBE of 100 eV or more, neither GaAs nor AlGaAs was substantially oxidized and equirate etching was observed. In 50 eV Ar/O2(2–5.3%) RIBE, however, both GaAs and AlGaAs were oxidized and etched little. In 100 eV Ar/O2(2%) RIBE, especially, AlGaAs was oxidized but GaAs was not, and a maximum selectivity of 13 was obtained in the etching of GaAs/Al0.5Ga0.5As. Impinging O+ions were found to be the main origin of oxidation.
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