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Magnetic properties of cobalt nitride thin films

 

作者: Morito Matsuoka,   Ken’ichi Ono,   Takashi Inukai,  

 

期刊: Applied Physics Letters  （AIP Available online 1986）
卷期: Volume 49, issue 15  

页码: 977-979

 

ISSN:0003-6951

 

年代: 1986

 

DOI:10.1063/1.97501

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Cobalt nitride (CoNx) thin films with a large perpendicular magnetic anisotropy are synthesized by reactive sputtering. The perpendicular magnetic anisotropy is induced by substrate heating during deposition, annealing after deposition, or ion bombardment during deposition.

 

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