The characteristic ionization energies, barriers associated with capture, energy levels, and introduction rates of the various electron and hole traps introduced by electron irradiation inn‐type GaP are determined using deep level transient spectroscopy. The same traps are created after 4 or 300 K irradiation. Their introduction rates correspond to those expected for primary displacements. From the similarity to the case of GaAs, we conclude that the corresponding defects are intrinsic defects (isolated vacancies and vacancy interstitial pairs) associated with the P (electron traps) and Ga (hole traps) sublattices.