首页   按字顺浏览 期刊浏览 卷期浏览 Kinetic model for plasma-based ion implantation of a short, cylindrical tube with auxil...
Kinetic model for plasma-based ion implantation of a short, cylindrical tube with auxiliary electrode

 

作者: T. E. Sheridan,   T. K. Kwok,   P. K. Chu,  

 

期刊: Applied Physics Letters  (AIP Available online 1998)
卷期: Volume 72, issue 15  

页码: 1826-1828

 

ISSN:0003-6951

 

年代: 1998

 

DOI:10.1063/1.121188

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Plasma-based ion implantation of the inner surface of a short, cylindrical tube is modeled using a two-dimensional particle-in-cell simulation. An auxiliary electrode, here a coaxial anode, is used to increase the ion impact energy. Initially, ions inside the tube impact the inner surface at approximately normal angles. At later times, ions enter the tube from the exterior plasma and impact predominantly near its center at glancing angles. Ions are found to cross the midplane of the tube and in some cases to pass completely through the tube, in contrast to the predictions of the “collisionless” fluid model. The total incident dose is greatest around the center of the tube, and least at its ends. ©1998 American Institute of Physics.

 

点击下载:  PDF (98KB)



返 回