The influence of surfactants on growth modes in molecular‐beam epitaxy: The growth of germanium layers on Si(100)
作者:
H. J. Osten,
G. Lippert,
J. Klatt,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1992)
卷期:
Volume 10,
issue 3
页码: 1151-1155
ISSN:1071-1023
年代: 1992
DOI:10.1116/1.585879
出版商: American Vacuum Society
关键词: GERMANIUM;SILICON;MOLECULAR BEAM EPITAXY;SURFACTANTS;ANTIMONY;STRAINS;Ge
数据来源: AIP
摘要:
Up to 30 nm thick Ge layers were grown on Si(100) by using Sb as a surfactant and were investigated by reflection high‐energy electron diffraction, x‐ray photoelectron spectroscopy, secondary ion mass spectroscopy, transmission electron microscopy, and confocal laserscan microscopy. The introduction of a surfactant alters the growth mode drastically from a three‐dimensional clustering mechanism to a two‐dimensional layer‐by‐layer growth. Smooth and strained Ge layers, with a thickness much larger then the critical thickness for commensurate growth, are achievable. The antimony monolayer mainly segregates on top of the grown germanium layer.
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