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Graded PZT thin film capacitors with stoichimetric variation by MOD technique

 

作者: Zheng Chen,   Koji Arita,   Myoungho Lim,   CarlosA. Paz De Araujo,  

 

期刊: Integrated Ferroelectrics  （Taylor Available online 1999）
卷期: Volume 24, issue 1-4  

页码: 181-188

 

ISSN:1058-4587

 

年代: 1999

 

DOI:10.1080/10584589908215590

 

出版商: Taylor & Francis Group

 

关键词: ferroelectric;PZT;graded;GFD;MOD

 

数据来源: Taylor

 

摘要:

By tailoring Zr/Ti ratio in Pb(Zr,Ti)O3from 45/55 to 75/25, functionally graded PZT thin films were prepared by metal organic decomposition (MOD) technique. P-E hysteresis loops were measured, and polarization was found to shift up or down depending on the direction of the composition gradients of the PZT. This polarization offset was modeled using Poisson's equation in one dimension. Switching charge was also found to be compositional gradient direction dependent.

 

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