In semiconductor device manufacturing, the use of toxic, corrosive gases and the generation of large amounts of solid by‐products make frequent maintenance inevitable, as the mechanical pump stops pumping. The requirements of semiconductor device manufacturers, especially those in the production areas, were foremost in mind to the pump manufacturer when the development of a new rotary vacuum pump line was started. The new ‘‘Quick Release’’ pumps reduce shutdown time by about one order of magnitude when compared with the currently available pumping system. This cost saving feature is due to the Quick Release concept; for the first time, the pumping module and the drive module are completely separate units, which combine into a single operating unit. When the pumping module is removed to undergo the necessary maintenance, the drive module remains connected to the pumping station, ready to receive the spare pumping module. All the power, control, and vacuum connections to or from the drive module are untouched. There is no dispersion of contaminated oil, as it is contained in the removed module. There is no need of complex checking of the equipment at start‐up. Simply lock the pumping module in place, and flip the start switch to operate.