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Metal film deposition by gas‐phase laser pyrolysis of nickel tetracarbonyl

 

作者: T. R. Jervis,  

 

期刊: Journal of Applied Physics  (AIP Available online 1985)
卷期: Volume 58, issue 3  

页码: 1400-1401

 

ISSN:0021-8979

 

年代: 1985

 

DOI:10.1063/1.336114

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A new technique for the deposition of nickel metal films by gas‐phase pyrolysis of nickel tetracarbonyl gas is described. A pulsed CO2laser is used to form a reaction zone adjacent to a cold substrate, resulting in a rapidly quenched film. The technique relies on dielectric breakdown of a mixture of source and carrier gases and therefore lends itself to a variety of source gases and chemistries. Adherence data and compositional and structural analyses are presented.

 

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