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Height effect in mass transfer analysis of the sublimation of solid precursor for a CVD process

 

作者: Guan‐Jr Tsai,   Kan‐Sen Chou,  

 

期刊: Journal of the Chinese Institute of Engineers  (Taylor Available online 1995)
卷期: Volume 18, issue 6  

页码: 771-776

 

ISSN:0253-3839

 

年代: 1995

 

DOI:10.1080/02533839.1995.9677745

 

出版商: Taylor & Francis Group

 

关键词: sample height;mass transfer analysis;CVD process

 

数据来源: Taylor

 

摘要:

The dependency of the sublimation rate of Cu(thd)2solid particles on the space height in the sample cell and under various gas velocities was investigated. Our results can be satisfactorily explained via a working model based on the combined effects of diffusion and convection. We also showed that due to the ever decreasing precursor quantity during a CVD process, its sublimation rate will decrease accordingly. Nevertheless, this decrease can be minimized and be made negligible by using a pelletized sample and placing this pellet in flush with the cell rim (i.e. zero space height).

 

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