Height effect in mass transfer analysis of the sublimation of solid precursor for a CVD process
作者:
Guan‐Jr Tsai,
Kan‐Sen Chou,
期刊:
Journal of the Chinese Institute of Engineers
(Taylor Available online 1995)
卷期:
Volume 18,
issue 6
页码: 771-776
ISSN:0253-3839
年代: 1995
DOI:10.1080/02533839.1995.9677745
出版商: Taylor & Francis Group
关键词: sample height;mass transfer analysis;CVD process
数据来源: Taylor
摘要:
The dependency of the sublimation rate of Cu(thd)2solid particles on the space height in the sample cell and under various gas velocities was investigated. Our results can be satisfactorily explained via a working model based on the combined effects of diffusion and convection. We also showed that due to the ever decreasing precursor quantity during a CVD process, its sublimation rate will decrease accordingly. Nevertheless, this decrease can be minimized and be made negligible by using a pelletized sample and placing this pellet in flush with the cell rim (i.e. zero space height).
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