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Novel wet chemical etch for nanostructures based on II-VI compounds

 

作者: A. Osinsky,   Y. Qiu,   J. Mahan,   H. Temkin,   S. A. Gurevich,   S. I. Nesterov,   E. M. Tanklevskaia,   V. Tretyakov,   O. A. Lavrova,   V. I. Skopina,  

 

期刊: Applied Physics Letters  (AIP Available online 1997)
卷期: Volume 71, issue 4  

页码: 509-511

 

ISSN:0003-6951

 

年代: 1997

 

DOI:10.1063/1.119593

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A simple wet chemical etch which produces stable and oxide-free surfaces of ZnSe is described. The etchant, a lowpHsolution ofH2SO4:H2O2:H2O,reacts with ZnSe producing an amorphous layer of Se which grows into the semiconductor. The Se layer is then dissolved in aqueous(NH4)2Sresulting in a S-passivated surface. The S-passivated layer is volatile and can be desorbed by heating the sample to 300 °C. The efficacy of this process is demonstrated by the formation of 20 nm wide quantum wires of CdZnSe/ZnSe with good optical properties. ©1997 American Institute of Physics.

 

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