Novel wet chemical etch for nanostructures based on II-VI compounds
作者:
A. Osinsky,
Y. Qiu,
J. Mahan,
H. Temkin,
S. A. Gurevich,
S. I. Nesterov,
E. M. Tanklevskaia,
V. Tretyakov,
O. A. Lavrova,
V. I. Skopina,
期刊:
Applied Physics Letters
(AIP Available online 1997)
卷期:
Volume 71,
issue 4
页码: 509-511
ISSN:0003-6951
年代: 1997
DOI:10.1063/1.119593
出版商: AIP
数据来源: AIP
摘要:
A simple wet chemical etch which produces stable and oxide-free surfaces of ZnSe is described. The etchant, a lowpHsolution ofH2SO4:H2O2:H2O,reacts with ZnSe producing an amorphous layer of Se which grows into the semiconductor. The Se layer is then dissolved in aqueous(NH4)2Sresulting in a S-passivated surface. The S-passivated layer is volatile and can be desorbed by heating the sample to 300 °C. The efficacy of this process is demonstrated by the formation of 20 nm wide quantum wires of CdZnSe/ZnSe with good optical properties. ©1997 American Institute of Physics.
点击下载:
PDF
(186KB)
返 回