This article discusses the resolution of synchrotron radiation lithography in the sub‐100 nm region, taking into consideration the mass production of large‐scale integrated circuits, under attainable conditions for the x‐ray mask, proximity gap, and resist processes. Resolution and exposure latitude for line‐and‐space patterns are markedly improved by using a mask with a contrast of only 2.5. Resolutions of 90, 80, 70, and 60 nm can be achieved with proximity gaps of 30, 20, 15, and 10 μm if a high‐contrast resist and a low‐surface tension developer are used. The latitude will be 10% for pattern sizes as small as 70 nm when the proximity gap is narrower than 15 μm. The effects of mask duty [which is defined to be the ratio of the absorber (line) width to the pattern pitch, i.e., duty cycle] on the optimum exposure dose and mask linearity are also evaluated.